Hitachi CG5000

Hitachi CG-5000; 3LP

Software: Included CG5000 CD-SEM 3 LP (300mm) 208V

E chuck

ROI Scan

Fast Scan

Ergonomics Modification

Circulator Input Voltage Modification

UL Safety Modification

SE-Gun back-up power supply

Ion Pump back-up power supply

SPM (Pre-focus only)

Multipoint Measurement

Gap Measurement

Corner Radius Measurement

Image Filing Function

Recipe Queue

ArF package

* Image info additional function to MSR File * Waveform Matching * Ax + B * Image Enhancement * Line Width Analysis * Power Cable (15m) * Optical Magnification (x100, x200) * Automatic Beam Alignment * BSE Detection 2 Dry Pump I/F Unit "F" 4 5kV Modification 5 Energy Filter 6 Flat Scan Function 7 200V Option 8 New Edge Roughness Measurement 9 Line Width Analysis Roughness Function 10 DS/T-PC link connection license 11 GEM 300 12 Loadport N2 Purge System 13 100nm Standard Microscale 14 Bottom Surface Masking 15 MPPC 16 Scan Overlap Function 17 Offline Recipe Applying Function 19 N2 Purge Modification Parts