2001 Bruce (BTI) DSVA 24

Diffusion Furnance for atmospheric oxid processes.

Tool is productive in use until 27.06.2022

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 200 mm

Number of Furnace Tubes 4

Furnace Tube #1:Process P-Diff

Gas System   Gas Input Control Mass Flow Controllers  Process Gases N2, O2, HCL, H2

Furnace Tube #2:Process Bor-Diff

Gas System   Gas Input Control Mass Flow Controllers  Process Gases N2, O2, HCL, H2

Furnace Tube #3:Process BPSG

Gas System   Gas Input Control Mass Flow Controllers  Process Gases N2, O2, HCL, H2

Furnace Tube #4:Process Tempern

Gas System   Gas Input Control Mass Flow Controllers  Process Gases N2, O2, HCL, H2

Gas Cabinet YES

Loading Station YES

Controller Manufacturer/Model DDC

Maximum Temperature 1,150  ºC  (2,102 ºF, 1,423 ºK)

Minimum Temperature 600  ºC  (1,112 ºF, 873.00 ºK)

Number of Control Zones 5

Overtemperature Protection YES

Year of Manufacture 2001

Condition Good