2001 EVG 620 TB Manual Mask Aligner

Vintage: 2001

Condition: used

Refurbishment, installation, training, service and support available

Available for full inspection and demonstration

Topside Alignment (TSA)

Backside Alignment (BSA)

Manual Handling

Manual Controlled Stage

Wafer Size: up to 6"/150mm

Objectives: 10x (top and backside)

Tooling Tray

Uniformity Test Plate

EVG 620 offers Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes

Tooling Exchanges are Quick, Simple and can be Performed Within Minutes

Lamphouse: 350W Lamphouse (Optional: 500W / 350W or LED Upgrade Upon Request)

Exposure Optics: Type C, 350nm - 450nm, Broadband

Microsoft Windows based User Interface

System PC, Keyboard, Cables

PDF Manual for EVG 620