1994 ATV Technologie GmbH PEO 602
1994 ATV Technologie GmbH PEO 602
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Description
This furnace can handle wafers up to 150mm
Configuration:
N2 - 1500 l/min
N2 - 660 l/min
Forming Gas 660l/min
Temperature Control 0°C – up to 500°C max.
Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)
Stainless Steel Calotte 0 – 5kg
Number of Furnace Tubes 1
CE Marked YES
Year of Manufacture 1994
Condition Good
Specifications
Manufacturer | ATV Technologie GmbH |
Model | PEO 602 |
Year | 1994 |
Condition | Used |
Stock Number | BM3136 |