Canon FPA-3000 i4

Reticle: Size 6" square t=? (Nikon Style or Canon Style reticle loader?): 6” Reticle / t= 0,25” / Nikon Type

Reticle Changer

Stage Type: ABS

Chamber Type: TBW-CD-80 (Compact Chamber Model) S.Nb.: CD80509157-C

Projection Optics:

Projection Magnification: 5 : 1

Exposure Light: i-Line (Hg-Lamp 2,0kW) (HBO 2001 W/CIELX #8983qM4)

Numerical Aperture: 0,63

Field Size: 22mm

Standard Illumination:

Exposure Light: i-Line

Light Source: Hg-Lamp 2,0kW

Intensity: ~6.900  (Std.Ill.Mode 0,63/0,65)

Uniformity: ~2,43% (Std.Ill.Mode 0,63/0,65)

Masking Blade: N/A

Printing Performance:

Resolution: 0,35µm

Depth of Focus: N/A

Image Field Deviation: N/A

Distortion: N/A

Focus/Leveling Performance:

Focus Repeatability: N/A

Leveling Repeatability: N/A

Minimum Compensation Range: N/A

Wafer Alignment Performance:

Lighting Source: BB + HeNe + iCal

Signal Process: N/A

System: N/A

Mode: N/A

Standard Stage Specification:

Step Accuracy: N/A

Scaling: N/A

Orthogonality: N/A

Standard Alignment Specification:

Reticle Rotation Accuracy: N/A

Wafer Alignment: N/A

Reticle: Standard Size 6" square t=0.25" ( Patticle checker) ? N/A

Material: N/A

Pattern Material: N/A

Pellicle Frame: Pattern Side only Stand Off = 6.3mm? Yes

Reticle Particle Checker Specification: 6” PPC (PPC-40S6)  

Detection Resolution

Glass Surface: 15µm

Pellicle Surface: 20µm

Detection Repeatability: >95%

Wafer:

Size: Standard 8” ( 6” thru 8” SEMI Standard, JEIDA,Notch / Flat, Optional): 8” Standard Notch

Throughput: >59wph (60 shot wafer)22mm ( 8” Wafer) N/A

Throughput: >83wph (32shot wafer)22mm ( 6” Wafer) N/A

Environmental Chamber Specification:

Cleanness: Class 1(>0.1µm) N/A

Chamber Specifications: N/A

Chamber Type: TBW-CD-80

Air Conditioner: N/A

Refrigerant: R422D (Umstellung auf R422D im Mai 2016)

Gram (g): N/A

Pounds (lbs): N/A