ASML Twinscan XT 1250 D Scanner 12"

ASML Twinscan XT 1250 D Scanner, 12"

- with Cymer XLA165

-Track Pre-warning signal (APR)s: APR enabled

- Avoid Track INPUT/OUTPUT conflicts, Raise AS after APRs: Avoid Track

- INPUT/OUTPUT conflicts enabled

- Active wafer release for dry WSs: FALSE

- Safeguard to prevent loading of reticles with too wide or mispositioned pellicles: Disabled

- Continuous clampable wafer table for dry WSs: Absent

- Type of wafer table on chuck 1 & 2 for immersion machines: Zerodur version 1

- Wafer Stage Configurations: Wafer Stage type 2 configuration

- Wafer Carrier Locations: Right

- Wafers per Carriers: 25

- Wafer Mark Sensors: Absent

- Wafer Id Readers: Absent

- Wafer Tracks: Present

- Wafer Stage Types: Dual Chuck

- Wafer Stress Relaxations: FALSE

- Lower Docking Plates: Present

- WS Balance Masss: Stainless Steel

- WH Robot Power Amplifiers: CPM 20

- Wafer Stage Fast Stiff X Move Electronicss: Present

- Wafer Stage Mirror Block Down Electronicss: Present

- Universal Prealignments: Disabled

- Interferometer axis version at exposures: 3 plus 1 axis

- Wafer Handling Pneumaticss: Dedicated

- Wafer Switchs: Absent

- Type of immersion hood for immersions: None

- Specifies chuck1 & 2 layout relev. for Immersions: Chuck does not support immersion

- Specifies chuck1 & 2 configs: Dry

- Specifies chuck1 & 2 versions: not specified

- Changed Short Stroke diff XY controllers: Disabled

-  Docking wheels at WH unloads: Present

- Docking plate heights: Low - Immersion Hood versions: Absent

- Carrier Handler Types: Mark I 300 Foup

- Wafer Handling Load & Unload Robot Types: Double Fold Arm, 12 mm Z stroke

- Wafer Handling Store Units: Absent

- Wafer Handler wrt BF Shifted in Zs: Not Shifted

- Reticle streaming lites: Disabled

- Enhancements in Reticle Monitors: no enhancements

- Reticle streaming: Disabled

- Improvements for reticle handlings: Disabled

- Extend IRIS maximum particles scanned to 50000.s: Absent

- Zeroing type for Encoders Measurement Systems: Using extra hall sensors for zeroing

- Reticle Stage Chuck Types: Glued Leafspring, TYPE_2: Glued LS, Pneum. GC, IFM / ENC Nitrogen purging of Reticle Stages: RS is not purged

- Reticle Carrier Locations: Right

- Integrated Reticle Inspection Systems: PPD1 with IRIS1 functionality

- Integrated Reticle Librarys: IRL with original functionality

- Reticle Sizes: 6 inch

- Reticle Carrier Tag Readers: Present

- Reticle Stage Long Stroke Motor Types: Cobalt Ferro 18 teeth

- Reticle Stage Long Stroke Configs: TYPE_3:CoFe_18 motor, SB controlled, int. vacuum supply, pneum GC

- Automated Reticle Transport Systems: Absent

- Reticle Stage Lenscooler Boxes: Lenscooler Box with anti-aliasing Filter

- Maximum Reticle ID Lengths: 24 Characters

- Reticle Stage Measurement System on Scans: Heidenhain Encoders

- Relative direction of ws to rs on the X axiss: Same

- RS Object Fields: Normal

- Reticle exchange types: Retex option: E