Hitachi RS-5500

SPEC IN ATTACHMENTS

Version V12.45

Type 12" TDK E3 2Port

OPTICS

SE-Tip If (1700K) 2.24 ~ 2.38 2.26

V1                  ： Ip Mode = Low 1600~2400 2000

IP Range           :   Ip Mode = Low 10 or more 120 or less 25.4~116.6

HV Information Vs < 50pA Setting > More than 0.1kV 0.45

V1  < 50pA Setting > 1.6kV~2.4kV 2.00

V2  < 50pA Setting > Changes according to the HV conditions 3.26

V0  < 50pA Setting > 2.5~2.0 2.20

Ie   < 50pA Setting >    Changes according to the HV conditions 25.0

VACUUM

Vacuum Ion-Pump Vacuum     ： IP-1 ＜2.0×10-7Pa 0.1 x 10-7Pa

                                       IP-2 ＜5.0×10-6Pa 0.1 x 10-7Pa

                                       IP-3 ＜5.0×10-5Pa 8.0 x 10-6Pa

Specimen chamber vacuum   ： Pe-1 ＜1.0×10-3Pa 1.0 x 10-3Pa

Loaderlock chamber vacuum ： Pe-2A ＜1.0×10-2Pa 1.0 x 10-2Pa

                                       Pe-2B ＜1.0×10-2Pa 1.0 x 10-2Pa

Pump TMP Status check No Fail OK

Vacuum pipe status check No broken,No leak OK

Utility Vacuum ≦-80kPa -91kPa

MINIEN Unit ≦-68kPa -82kPa

Dry air    600±20kPa 680kPa

MINIEN Unit 550～700kPa 580kPa

N2         ： High 385±15kPa 380kPa

                 Low 90±10kPa 78kPa

STAGE

1 MINIEN Robot Initialize check Operation check OK

Pre Aligner initialize check Operation check OK

Aligner Line sensor 4095±1 4094~4095

Loaderport Initialize check Operation check OK

LCA LCB

2 Loader lock Sensor amp Sensitivity check ： W1 The green LED flashes 3 times or more OK OK

                                  W2 The green LED flashes 3 times or more OK OK

                                 H The green LED flashes 3 times or more OK OK

                                  12H The green LED flashes 3 times or more OK OK

                                 8H The green LED flashes 3 times or more OK OK

                                     SS(HP) The green LED flashes 3 times or more OK OK

                                AV2 The green LED flashes 3 times or more OK OK

                                  AV3-1(Out1) The green LED flashes 3 times or more OK OK

                                  AV3-2(Out1) The green LED flashes 3 times or more OK OK

Clank arm ststus check Operation check OK OK

Holder loading check (Manual mode)

(LC ↔ SC) None OK N/A

3 Stage X Y

Laser reciever voltage check 1.0V or more 1.23 1.31

Halogen lamp check Adjust The B&C OK

Wafer auto loading test No Error OK