Canon i4
Canon i4
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Description
Working condition
Description Fine Pattern Aligner
FPA-3000i4 Configuration
Magnification 5X
Resolution 0.35um
Wafer Size 8" SEMI (OF)
Wafer Loader TYPE6-L
Reticle Size 6"
Reticle Changer Canon standard Type
Chamber Type CD-80
Specifications
| Manufacturer | Canon |
| Model | i4 |
| Condition | Used |
| Stock Number | BM2908 |