1996 Eaton NV8200P Dose2 Block3

Cryo: 3x CTI Onboard 8 (refurbished)

CTI 9600 Low-Voltage

0 - 250Kv Midcurrent

Power Requirements 200-208 V   55.0 A   50/60 Hz   3 Phase

CE Marked YES

Turbo: Leybold: LH600C + LH1000C + LH151C (refurbished)

Rough Pumps: Edwards: 2x QDP40 (not included)

8inch(200mm)

E-Chuck green with Non-µC Controller

Condition Good

Galden HT110 with 20 degree Heatexchanger

Gasbox: Matheson 5-String, 3x Toxic 2,0L Size

BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Brooks-GF120X; 3sccm

AsH3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-P2A035200RBT; 2sccm

PH3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640; 5sccm

Condition unknown, missing parts: Valves + MFC + Pipes!

Argon Carriergas; MFC Horiba-Z500; 4sccm

Belt-Drive

Scan: Harmonic Tilt: Harmonic

ELS4 IHC-Source without Vaporizer

Mineral-Oil

Solaris SUN AXI 4HE

Solaris SUN Sparc5

Software: 5.1.4.1

Network 24port 100MB Ethernet with Cisco Router-Kit

Cell-Controller: 177 Type

Notes:

No small Differential-Seal-pump include(was connected on Endstation-Rough-Pump), Clean-Room Table missing on frontside, Matheson Gasbox, 1 String Condition unknown and Parts missing on this string, all 4 wheels on oil-isolation transformer are broken, Minor modifications on tool, No fully Manual-Set include, tool was used 24/7 full in production between 15 and 230kv Energy