Watkins Johnson WJ999

WJ-999 RMCS

Gas type Hydride TEOS

Process BPSG PSG NSG

Silicone Other

Main body OLD999 999R TEOS999 Ver.3.5 WJ1000V2.0

WJ1000V3.0 1000T V2.0 1000T V3.0 WJ-1500

Handler 9.3 11.3 11.4 Other

Gas Hydride TEOS

Process BPSG PSG NSG

Target thickness 3000Å 5000Å 8000 Other

(WJ-999) 4”Single 5”Single 6”Single 8”Single

4"Double 5"Double 6"Double

INJ size 8”Size 12”Size

INJ type Palallel Monoblock

UPS Yes No

MFC type Tylan Aera Stec Other

MFC (999) D1N2 SPN2 D2N2 SiH4

O2 B2H6 PH3

Missing parts: N/A