TEL ALPHA -8(AP)

Process Pyro Oxide

Wafer Size 200mm

Process Wafer Qty 126

Process Type Oxide

I/O Port / Smif I/O port

Load Lock NO

Carriet Slor 25 Slot

boat type Single

System Controller TS4000Z

Operation Screen Touch Screen

Gas Flow Chart (front and rear) ◎ ◎

Temperature Controller M120

Vacuum Pressure Control N/A

Controller Transformer 1Φ 208V

7 Heater Transformer 3Φ 208V

Oxygen Analyzer N/A

HEC Pyro Ctl Yes

***Further SPEC in images