Denton Vacuum Explorer 14 DC Sputtering System- Rebuilt

Chamber: 12 in. dia. x 18 in. High glass Pyrex bell jar with guard

15-inch diameter baseplate

Turbomolecular pump

LN2 trap located beneath high vacuum poppet valve and manual fill via external funnel

Alcatel 2010 two stage rotary vane pump.

300W DC power supply

DSM-300A 4-inch dia. magnetron sputter source with Denton Vacuum patented ANODE GRID® for maximum electron capture and minimal specimen heating

Variable source to substrate distance

Substrate Fixturing: 8.0 in. Omni rotating fixture plate, speed adjusts via input to system touch screen

Air operated shutter

Control System: The Explorer 14 system is semiautomatic and is controlled by a DL205 CPU from Automation direct

The operator interface is a touch panel with graphical interface to the PLC

Graphical interface is supported with Automation direct software

Manual operation of valves, pumps, low voltage sources and fixture rotation subsystems is through this graphical interface

Semiautomatic processes are also operated through this interface