KLA-TENCOR M-gage 300

Tool Name & Model: Tencor M-gage 300 Sheet Resistance Measurement System (50-03000)

For 2 To 6 Inch Metal Thin Film Metrology

Description: The M-Gage 300 measures sheet resistance in ohms per square or miliohms per square on an up to 6” wafer. If specific resistivity is known, the thickness of the deposited film layer can be computed from the sheet resistance measured. It’s a non-contact measurement instrument which is taking by Eddy Current. The Digital Data Converter will perform this computation automatically. On both instruments the choice of measurement data is easily switch selectable, as is the choice of units. When used with the Digital Data Converter and printer, all measurement information is printed automatically.

Wafer Size: 2”- 6”, manual load

Configuration:

1. Tester with Display
2. 150mm 5 points optical encode disk
3. DDC (Digital Data Converter, Model Number: 20-03030)
4. Printer (Optional)

Typical Specifications:

·       Measurement range

• Ω/sq range                                   1 Ω/sq -1,999 Ω/sq
• mΩ/sq range 1 mΩ/sq -1,999 mΩ/sq
• Film Thickness, calculated by DDC: 100Å min. ~ 270KÅ (when the Resistivity is 2.7µΩ-cm)
• Sheet Resistance Repeatability. Total repeatability is the standard deviation (σ) percent of mean value, ±1 count:
• 1 to 100 mΩ/sq, Ω/sq σ/ave <±0%;
• 100 to 500 mΩ/sq, Ω/sq σ/ave <±0%;
• 500 to 1000 mΩ/sq, Ω/sq σ/ave <±0%;
• 1000 to 1999 mΩ/sq, Ω/sq σ/ave <±0%.
• Power Requirements: 110Vac, 50-60Hz, <15A
• Display: 3 ½ Digit LED display, autoranges over three decades
• Shipping Weight: 7 kg (15.5 lbs)
• Dimensions: Tester: 24cm (9.5″)W x 19cm (7″)H x 39cm (15.5″)D

Condition: Used.