Hitachi S-4800-II

Vintage: 2004/2007

Process Type: FA SEMs/TEMs/Dual Beams

Status of Equipment: Refurbished

Specification:

Secondary electron image resolution:

1.0nm (15kV, WD=4mm)

1.4nm (1kV, WD=1.5mm, Deceleration mode)

2.0nm (1kV, WD-1.5mm, Normal mode)

Magnification:

LM mode: 20 ~ 2,000X

HM mode: 100 ~ 800,000X

Specimen Stage:

Stage Motorization: 5 Axis Stage Motorization

Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg

Configuration:

Operating System: Windows XP (Windows 10 upgrade as an option)

Turbo Pump

Joy Stick stage control

Decleration mode RS-232C

Option: IXRF EDX