1997 KLA AIT I Main System

1997 KLA AIT I Main System
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Description
Currently Configured for 6"/150mm & 8"/200mm Wafers
Double Darkfield Inspection Tool
SECS II/GEM Communication Interface
Low Contact Chuck (AIT I)
Multi Channel Collection Optics System with Independent Programmable Spatial Filters
Pentium CPU with Windows NT Installed
Wafer Transfer Area Housing Cover
Wafer Handling Module
High Voltage Electronics
Front and Rear EMO’s with Covers
Flat Panel Display for AIT
Fold Down Keyboard Tray with Built In Mouse
X/Y Drive/Controller Chassis and Motion Controller Card
Blower Box (exhaust hoses not included)
Operations Manual and Documentation
Specifications
Manufacturer | KLA |
Model | AIT I Main System |
Year | 1997 |
Condition | Used |
Stock Number | BM2679 |