Semitool Equinox Plating System

- Model: Equinox

- Configured for 150mm Wafers

- 4 Plating Chambers

- 2 Preclean / SRD Chambers

- Genmark Radial Robot

- 1 Tank Ultrasonic Level Sensor

- ARU Interface

- Levitronix Pumps

- Surpass Flow Meters

- Pall 10” Filter Housings (Plating Cells)

- Pall 4” Filter (Prewet Tank)

- Sample Port

- Fire Suppression System

- Chemical Bulk Fill

- Dynatronix Pro Series Plating Power Supply (4-Cell)

- Tank Heat Exchange Connections

- Power: 208VAC, 80A, 50/60Hz