EVG 101 Spray Coating System

- Model: EVG 101

- Semi-Automatic, with Manual loading

- Suitable for wafer sizes 1" - 8" wafers (with proper chucks and pre-aligner)

- Currently configured for 1" - 6" wafers

- One Coat Module

- One Cleaning Module

- Base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, and exhaust lines

- Manual loading and mechanical pre-aligner (pneumatically actuated)

- PC controlled with windows based graphical user interface

- Password protected access levels

- Programmable rotational speed for substrate

- Syringe dispense for spray nozzle option included

- Spinner chucks for 1" - 3" and 4" - 6" wafers

- 4 Floor Mounting Brackets included

- 1 Vacuum Wand for wafer handling

- Exhaust Controller included

- Operations Manual and Documentation included