2007 LAM 2300 FLEX 45

Wafer size: 12"

<PM2>

FLEX 45 (23F450455(F104683-PM2)) / 2007

RF Match: 853-040482-301

Pendulum Valve: Missing

TMP: EDWARDS STP-A2203C3

Pendulum Valve: 65048-PH52-ADR1 Type : 229351

Manometer

CM1: E28D-30653 Range 0.1Torr

CM2: 625A-14059 Range 10Torr

CM3: 625A-14059 Range 10Torr

AC Enclosure: 853-800083-442

Anapaizer Board: 778-900046-405

DC Enclosure Power Supply: 853-800087-404

VME Enclosure: 853-042958-052

CPU VME 7671: 605-048878-001

Lon Control B/D: 605-707109-012

VIOP B/D Step Driver: 810-099175-011

Lonworks Ip Server: 685-042168-002

RF FEED LINE: Yes

ESC: 839-800327-432

ESC Power Supply: Yes

OES: 685-801852-005

OES Cable: Yes

Noad Board 1: Yes

Noad Board 2: Yes

Noad Board 3: Yes

Helium MFC: Yes

Photon Controller: Yes

Capacitor Control B/D: Yes

Interlock Board: Yes

2Mhz 5000Watt Generator: Yes

27Mhz 3000Watt Generator: 660-002294-002

60Mhz 2500Watt Generator: 685-002302-002

TMP Controller: SCU-1600

<PM3>

FLEX 45 (23F450456(F104683-PM3)) / 2007

RF Match: 853-040482-301

Pendulum Valve: Missing

TMP: EDWARDS STP-A2203C3

Pendulum Valve: 65048-PH52-ADR1 Type : 229351

Manometer

CM1: E28D-30653 Range 0.1Torr

CM2: 625A-14059 Range 10Torr

CM3: 625A-14059 Range 10Torr

AC Enclosure: 853-800083-442

Anapaizer Board: 778-900046-405

DC Enclosure Power Supply: 853-800087-404

VME Enclosure: 853-042958-052

CPU VME 7671: 605-048878-001

Lon Control B/D: 605-707109-012

VIOP B/D Step Driver: 810-099175-011

Lonworks Ip Server: 685-042168-002

RF FEED LINE: Yes

ESC: 839-800327-432

ESC Power Supply: Yes

OES: 685-801852-005

OES Cable: Yes

Noad Board 1: Yes

Noad Board 2: Yes

Noad Board 3: Yes

Helium MFC: Yes

Photon Controller: Yes

Capacitor Control B/D: Yes

Interlock Board: Yes

2Mhz 5000Watt Generator: Yes

27Mhz 3000Watt Generator: 660-002294-002

60Mhz 2500Watt Generator: 685-002302-002

TMP Controller: SCU-1600

<PM3>

FLEX 45 (23F450457(F104683-PM4)) / 2007

RF Match: 853-040482-301

Pendulum Valve: Missing

TMP: EDWARDS STP-A2203C3

Pendulum Valve: 65048-PH52-ADR1 Type : 229351

Manometer

CM1: E28D-30653 Range 0.1Torr

CM2: 625A-14059 Range 10Torr

CM3: 625A-14059 Range 10Torr

AC Enclosure: 853-800083-442

Anapaizer Board: 778-900046-405

DC Enclosure Power Supply: 853-800087-404

VME Enclosure: 853-042958-052

CPU VME 7671: 605-048878-001

Lon Control B/D: 605-707109-012

VIOP B/D Step Driver: 810-099175-011

Lonworks Ip Server: 685-042168-002

RF FEED LINE: Yes

ESC: 839-800327-432

ESC Power Supply: Yes

OES: 685-801852-005

OES Cable: Yes

Noad Board 1: Yes

Noad Board 2: Yes

Noad Board 3: Yes

Helium MFC: Yes

Photon Controller: Yes

Capacitor Control B/D: Yes

Interlock Board: Yes

2Mhz 5000Watt Generator: Yes

27Mhz 3000Watt Generator: 660-002294-002

60Mhz 2500Watt Generator: 685-002302-002

TMP Controller: SCU-1600

<EFEM>

EFEM: V2

ATM Robot: Brooks(151864CUR)

Aligner: Yes

Buffer: Yes

Cool station: Yes

Pump: Missing

Terminal Server: Yes

OHT & Sensor Node B/D: Yes

AGV Node Board: Yes

Ethernet Server: Yes

Front UI Panel: Yes

Name Plate: Yes

<AC Rack>

AC Rack: V2

ATM Robot Controller: Brooks(175789R)

UPS Power Supply: Yes

Main PC: Yes (HDD Missing)

Monitor: Yes

Circuit Breaker: Yes

<Load Pord>

Load Port: V2 (002-7200-29 , 32)

Maker: Brooks

LP1: Yes, LP2: Yes, LP3:Yes

<VTM>

VTM: V2

L-VAT Door: AL1, AL2(07512-UA24-ADI2)

Angle Valve: AL1, AL2, TM(MKS)

Pressure Gauge: AL1, AL2, TM

Rocker Valve: AL1, AL2, PM2, PM3, PM4

VTM ROBOT: Magnatran7(003-1600-37)

Solenoid Valve: Yes

VTM Mother B/D: Yes

Node N/D: Yes

Super Slot B/D: Yes

< GIB Gas Box >

GIB Gas Box: V2 (IGS Type)

Damper: Yes

FIB: No

Gas Line:

PM2: 571-033051-12535B1, Gas Line: 12

PM3: 571-033051-12535C1, Gas Line: 12

PM4: 571-033051-12535D1, Gas Line: 12

Missing Parts: HDD, EFEM Pump