Alcatel AMS 4200, Deep Reactive Ion Etch (DRIE), RF Generator, Mag 7 Robot, Controller rack, etc

200mm

Used, looks complete, very clean

Tool Configuration:

MFG Date: 2008

Deep Silicon Etch Alcatel AMS 4200

- Brooks Platform

- Dual Loadlocks

- Magnatron 7

- Alcatel ACT 600M TMP Turbo 

- User Interface PC

- Transfer PC Process Chamber: AMS X200

- sn MX2R 205 846

- Alcatel ACT 1300M TMP Turbo

Process Gases:

- SF6 1000sccm

- C4F8 400sccm

- O2 100sccm

- O2 800sccm

- Ar 200sccm

- N2 1000sccm

- Ar

- CHF3 EDM

- CS200-11729

- sn CS11829

- 200/208VAC, 3 Phase, 50/60Hz Alcatel AMS X200

- snMC2R 205

 - CE Marked

- Qty 2 - SEMCO HV52000C - SEREN L301 RF

- Advanced Energy Dressler Cesar RF - ENI Spectrum B-3013 RF

- 208VAC, 3 Phase, 50/60Hz