TEL Tokyo Electron 300mm Stainless ADH Adhesion Process Station Lithius Working

TEL Tokyo Electron 300mm Stainless ADH Adhesion Process Station Lithius Working

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Description

  • Model No: ADH Adhesion Process Station
  • Removed from a TEL Tokyo Electron Clean Track Lithius System
  • Made in Japan

Installed Components

  • RKC Instrument Part No: REX-B875-CS1A2
  • PCB Part No: HTE-MC2-B-12, BOARD, CONN HPB #01, TMB2101
  • PCB Part No: HTE-TC1-B-12, BOARD, IF TC CTRL #01, TMB2000

Parts List (approximation, parts may vary or not be included or installed)

Assembly Part No: 5087-401692-19 BASE(HP) ASSY,BACK

  • 5010-101312-12 FRAME (Qty.1)
  • 5003-300048-11 BRACKET(R) (Qty.1)
  • 5010-405342-11 PLATE (Qty.1)
  • 5003-300047-11 BRACKET(L) (Qty.1)
  • 5010-405930-11 BRACKET (Qty.1)
  • 5010-405344-11 COLLAR (Qty.1)
  • 5010-306424-11 COVER (Qty.1)
  • 5010-407435-11 SEAL (Qty.2)
  • 5003-200013-11 DUCT(R) (Qty.1)
  • 5003-200012-11 DUCT(L) (Qty.1)
  • 5010-309775-11 PLATE (Qty.2)
  • 5003-300040-11 PORT 2
  • 5010-309520-11 SHUTTER(R) (Qty.1)
  • 5010-309519-11 SHUTTER(L) (Qty.1)
  • 5010-404625-11 PLATE (Qty.2)
  • 5010-407356-11 BRACKET (Qty.2)
  • 5010-404632-11 SUPPORT,PIN (Qty.1)
  • 5010-405346-11 BRACKET (Qty.1)
  • 5010-405347-11 SEAL (Qty.1)
  • 5010-405348-11 SEAL (Qty.1)
  • 5010-406157-11 PLATE (Qty.1)
  • 5010-406155-11 PLATE (Qty.1)
  • 5010-406158-11 PLATE (Qty.1)
  • 5010-406156-11 PLATE (Qty.1)
  • 5010-407046-11 PLATE (Qty.2)
  • 5010-405582-11 PACKING (Qty.2)
  • 5086-403977-11 SENSOR,CYLINDER ADH U/D #02 (Qty.1)
  • 5086-400794-11 SENSOR,PROXIMITY ADH #01 (Qty.1)
  • 5086-401786-11 SENSOR,PROXIMITY ADH #02 (Qty.1)
  • 5086-400797-12 SENSOR,THERMOSTAT LHP #01 (Qty.1)
  • 5041-000236-11 CABLE ASSY 1746253-3(THERMO EXT #03) (Qty.1)
  • 5018-000014-11 LM GUIDE LS200118ALK1 (Qty.2)
  • 020-006514-1 CAP SCREW CBSST6-12 (Qty.1)
  • 5024-000080-11 AIR CYLINDER SSD-T1L2550-X09 (Qty.1)
  • 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 (Qty.2)
  • 028-003339-1 FITTING,TUBE M-5HL-6 (Qty.2)
  • 026-007246-1 SPACER WSSS5-3-1 (Qty.8)
  • 020-000005-1 CAP SCREW M3*6 SUS304 (Qty.20)
  • 020-001091-1 CAP SCREW M4*16 SUS304 (Qty.8)
  • 020-000518-1 CAP SCREW M3*4 SUS304 (Qty.11)
  • 020-000012-1 CAP SCREW M3*12 SUS304 (Qty.2)
  • 020-000057-1 CAP SCREW M5*12 SUS304 (Qty.8)
  • 020-001167-1 CAP SCREW M5*10 SUS304 (Qty.8)
  • 020-000090-1 CAP SCREW M6*20 SUS304 (Qty.4)
  • 020-000030-1 CAP SCREW M4*8 SUS304 (Qty.4)
  • 032-000024-1 FLAT WASHER M6 SUS304 POLISHED ROUND (Qty.1)
  • 026-102041-1 SET PLATE TM-147-1-5563 WASHER (Qty.2)
  • 020-000009-1 CAP SCREW M3*10 SUS304 (Qty.4)
  • 020-000414-1 CAP SCREW M2*4 SUS304 (Qty.2)
  • 020-001126-1 SET SCREW M4*5 SUS304 (Qty.2)
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND (Qty.9)

Assembly Part No: 5087-401608-12 PIN(ADH) ASSY

  • 5010-305466-11 BASE,PIN (Qty.1)
  • 5010-311607-11 BRACKET (Qty.1)
  • 5010-404667-11 PLATE (Qty.1)
  • 5010-400930-11 COLLAR (Qty.1)
  • 5010-404577-11 ROD (Qty.1)
  • 5010-401163-11 PLATE (Qty.1)
  • 5010-307257-11 PLATE (Qty.1)
  • 5010-306713-11 BLOCK (Qty.1)
  • 5086-403976-11 SENSOR,CYLINDER ADH U/D #01 (Qty.1)
  • 5003-400007-11 PIN(56) (Qty.3)
  • 026-005603-1 SPACER WSSS10-4-1 (Qty.1)
  • 5024-000079-11 AIR CYLINDER SSD-T1L1623-X06 (Qty.1)
  • 5018-000011-11 LM GUIDE LS150080CLK1 (Qty.1)
  • 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 (Qty.2)
  • 020-000028-1 CAP SCREW M4*6 SUS304 (Qty.2)
  • 020-000510-1 CAP SCREW M2.6*10 SUS304 (Qty.3)
  • 020-000032-1 CAP SCREW M4*10 SUS304 (Qty.7)
  • 020-000642-1 CAP SCREW M3*55 SUS304 (Qty.4)
  • 020-002059-1 SET SCREW M3*5 SUS304 (Qty.2)
  • 020-000519-1 CAP SCREW M3*16 SUS304 (Qty.2)
  • 020-000005-1 CAP SCREW M3*6 SUS304 (Qty.2)
  • 020-001093-1 CAP SCREW M4*14 SUS304 (Qty.2)
  • 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE (Qty.4)

Assembly Part No: 5085-407303-12 SUPPORT(ADH) ASSY

  • 5010-101307-11 RING(ADH),SUPPORT (Qty.1)
  • 2910-437210-11 PACKING (Qty.1)
  • 2910-420314-11 PACKING (Qty.1)
  • 2910-303824-13 SEAL (Qty.1)
  • 5010-203089-11 FLANGE (Qty.1)
  • 5010-305464-11 PLATE (Qty.1)
  • 5010-403103-11 PACKING (Qty.1)
  • 5010-405457-11 PLATE (Qty.2)
  • 028-002124-1 FITTING,TUBE F900-AT-6.35A (Qty.6)
  • 028-002197-1 FITTING,TUBE F900-H-6.35A (Qty.1)
  • 028-002257-1 FITTING,TUBE F900-L-6.35 (Qty.5)
  • 028-002302-1 FITTING,TUBE F900-T-6.35 (Qty.5)
  • 028-006637-1 FITTING,RESIN EUT1/4-C1 (Qty.1)
  • 020-000057-1 CAP SCREW M5*12 SUS304 (Qty.12)
  • 020-000020-1 CAP SCREW M3*20 SUS304 (Qty.6)
  • 020-001089-1 CAP SCREW M3*14 SUS304 (Qty.6)
  • 020-000028-1 CAP SCREW M4*6 SUS304 (Qty.12)
  • 027-000431-1 O-RING BYTON AS568-251 BLACK (Qty.2)
  • 020-000030-1 CAP SCREW M4*8 SUS304 (Qty.4)

Assembly Part No: 5087-401362-16 BASE(E-ADH) ASSY

  • 5010-306409-11 COVER (Qty.1)
  • 5010-308906-11 BRACKET (Qty.1)
  • 5010-202625-11 COVER (Qty.1)
  • 5010-404767-11 COVER (Qty.1)
  • 5010-404768-11 COVER (Qty.1)
  • 5010-405337-11 BRACKET (Qty.1)
  • 5010-404318-11 BRACKET (Qty.1)
  • 5010-306706-11 PAN,DRAIN (Qty.1)
  • 5010-101124-11 COVER (Qty.1)
  • 5010-308904-11 BLOCK (Qty.1)
  • 5010-308910-11 BRACKET (Qty.1)
  • 5010-101517-11 BASE (Qty.1)
  • 5003-200010-11 PLATE,COOL (Qty.1)
  • 5010-307207-11 PLATE (Qty.1)
  • 5010-303511-11 PLATE (Qty.1)
  • 5010-403503-11 PLATE (Qty.1)
  • 5010-407044-11 BRACKET (Qty.1)
  • 5010-202632-11 PIPE (Qty.1)
  • 5010-308907-11 SEAT (Qty.1)
  • 5010-405219-11 TUBE (Qty.1)
  • 5041-000255-12 CABLE ASSY 1717319-7 (ADH EXT #01) (Qty.1)
  • 5086-400795-11 CABLE,ADH SIG #01 (Qty.1)
  • 5086-400798-11 SENSOR,PRESS ADH VAC #01 (Qty.1)
  • 5086-401787-12 CABLE,ADH EXT #04 (Qty.1)
  • 5086-402006-11 CABLE,GND ADH #02 (Qty.1)
  • 5014-000001-11 ACOUSTIC UNIT REX-B875-CS1 (Qty.1)
  • 5044-000003-11 PCB,I/F TMB2000(BOARD,IF TC CTRL #01) (Qty.1)
  • 5044-000007-11 PCB,I/F TMB2101(BOARD,CONN HPB #01) (Qty.1)
  • 5041-000228-11 CABLE ASSY 1717338-1 (DC ADH PWR #01) (Qty.1)
  • 5041-000232-11 CABLE ASSY 1717320-1 (ADH EMO #01) (Qty.1)
  • 5086-400802-11 CABLE,ADH EMO #02 (Qty.1)
  • 5086-401627-11 CABLE,GND ADH #01 (Qty.1)
  • 5010-407045-11 BRACKET (Qty.2)
  • 5010-402221-11 HOLDER (Qty.1)
  • 028-004347-1 FITTING,TUBE KJL06-01S (Qty.3)
  • 028-004353-1 FITTING,TUBE KJU06-00 (Qty.1)
  • 028-017536-1 FITTING,TUBE IN-233-1369 (Qty.1)
  • 024-012193-1 SPEED CONTROLLER INA-14-176(199880070511 (Qty.6)
  • 5012-000021-11 SOLENOID VALVE SS5Y3-03-X1236 (Qty.1)
  • 5012-000069-11 AIR OPERATION VALVE AMG01-8BUR-X0421-T (Qty.1)
  • 028-003337-1 FITTING,TUBE M-5H-4 (Qty.3)
  • 028-003338-1 FITTING,TUBE M-5HL-4 (Qty.3)
  • 020-001720-1 SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE (Qty.3)
  • 044-000044-1 SUPPORT,PCB EM-3 (Qty.8)
  • 026-006336-1 SPACER FWSSS-D5-V3-T1.3 (Qty.2)
  • 020-001178-1 CAP SCREW M3*30 SUS304 (Qty.4)
  • 020-000517-1 CAP SCREW M3*3 SUS304 (Qty.16)
  • 020-001186-1 CAP SCREW M3*35 SUS304 (Qty.4)
  • 020-000042-1 CAP SCREW M4*20 SUS304 (Qty.2)
  • 020-000005-1 CAP SCREW M3*6 SUS304 (Qty.10)
  • 020-000028-1 CAP SCREW M4*6 SUS304 (Qty.8)
  • 020-000032-1 CAP SCREW M4*10 SUS304 (Qty.13)
  • 020-002601-1 BAIND SCREW M3*4 SUS304 (Qty.4)
  • 028-002157-1 FITTING,TUBE F900-F-9.52 (Qty.1)
  • 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304
  • 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER
  • 028-006338-1 FITTING,TUBE EC4-M5A-TR (Qty.2)
  • 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE (Qty.2)
  • 017-002651-1 TUBE PFA-HG L 6.35*4.35-200*500 (Qty.2)
  • 032-000016-1 WASHER,TOOTHED LOCK M4 SUS EXT (Qty.1)
  • 020-000657-1 CAP SCREW M4*4 SUS304 (Qty.1)
  • 028-002152-1 FITTING,TUBE F900-F-6.35 (Qty.2)
  • 028-006361-1 FITTING,TUBE EUC6-TR (Qty.3)
  • 028-005698-1 FITTING,TUBE BC6 (Qty.2)
  • 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND (Qty.1)

Assembly Part No: 5085-402644-12 PLATE(ADH) ASSY

  • 5010-402349-11 GUIDE 6
  • 5043-000005-12 HOT PLATE NGT12-HP(ADH)-FCJ (Qty.1)
  • 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304

Assembly Part No: 5085-407298-13 CHAMBER(ADH) ASSY

  • 5010-101192-11 CHAMBER (Qty.1)
  • 5010-202745-11 NOZZLE (Qty.1)
  • 5010-404889-11 PLATE (Qty.1)
  • 5010-202646-11 BRACKET (Qty.1)
  • 5010-405338-11 SHAFT (Qty.4)
  • 5010-405339-11 COLLAR (Qty.4)
  • 5010-401175-11 PLATE (Qty.4)
  • 5010-405602-11 SPACER (Qty.4)
  • 5010-405340-11 BRACKET (Qty.1)
  • 5010-202627-11 ARM(L) (Qty.1)
  • 5010-203123-11 ARM(R) (Qty.1)
  • 5010-309220-11 BRACKET(R) (Qty.1)
  • 5010-309221-11 BRACKET(L) (Qty.1)
  • 5010-407238-11 PLATE (Qty.2)
  • 5010-405691-11 BRACKET (Qty.1)
  • 5010-405729-11 BLOCK (Qty.1)
  • 027-000088-1 O-RING BYTON AS568-023 BLACK (Qty.1)
  • 5036-000001-11 #MAGNET TZ-0082 (Qty.1)
  • 020-000020-1 CAP SCREW M3*20 SUS304 (Qty.6)
  • 020-000417-1 CAP SCREW M2*10 SUS304 (Qty.2)
  • 020-000028-1 CAP SCREW M4*6 SUS304 (Qty.6)
  • 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER
  • 020-001116-1 CAP SCREW M5*8 SUS304 (Qty.4)
  • 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304

Assembly Part No: 5085-408278-14 COVER(ADH)ASSY,BACK

  • 5010-307662-11 BASE,PANEL (Qty.1)
  • 5010-306689-11 PANEL (Qty.1)
  • 5010-306690-11 PLATE,NUT (Qty.1)
  • 5010-306691-11 PLATE,NUT (Qty.1)
  • 5010-307111-11 PACKING (Qty.1)
  • 5010-405584-11 LEVER (Qty.2)
  • 5010-406153-11 BASE,HOLDER (Qty.1)
  • 5010-406150-11 HOLDER (Qty.1)
  • 5010-406148-11 PACKING (Qty.1)
  • 5010-406149-11 PACKING (Qty.1)
  • 5010-308897-11 PANEL (Qty.1)
  • 026-007272-1 SPACER FWSSS-D5-V3-T1.5 (Qty.5)
  • 020-006233-1 FACE SCREW M3*8 ROUNDED KNOB BLACK THUMB SCREW (P0287
  • 026-002709-1 HANDLE A-67 (Qty.1)
  • 020-000005-1 CAP SCREW M3*6 SUS304 (Qty.2)
  • 020-000518-1 CAP SCREW M3*4 SUS304 (Qty.4)
  • 020-002603-1 BIND SCREW M3*10 SUS304 (Qty.13)
  • 020-000414-1 CAP SCREW M2*4 SUS304 (Qty.2)
  • 020-000034-1 CAP SCREW M4*12 SUS304 (Qty.2)
  • Sold As-Is

This TEL Tokyo Electron 300mm Stainless ADH Adhesion Process Station is used working surplus. The unit does not include a viewport panel and there are minor changes to the upper piping lines (see photos). The physical condition is good, but there are signs of previous use and handling.

Specifications

ManufacturerTEL
ModelTokyo Electron 300mm Stainless ADH Adhesion Process Station Lithius Working
ConditionUsed
Stock NumberGOD23082019720221667