TEL Tokyo Electron 300mm Stainless ADH Adhesion Process Station Lithius Working

• Model No: ADH Adhesion Process Station
• Removed from a TEL Tokyo Electron Clean Track Lithius System
• Made in Japan

Installed Components

• RKC Instrument Part No: REX-B875-CS1A2
• PCB Part No: HTE-MC2-B-12, BOARD, CONN HPB #01, TMB2101
• PCB Part No: HTE-TC1-B-12, BOARD, IF TC CTRL #01, TMB2000

Parts List (approximation, parts may vary or not be included or installed)

Assembly Part No: 5087-401692-19 BASE(HP) ASSY,BACK

• 5010-101312-12 FRAME (Qty.1)
• 5003-300048-11 BRACKET(R) (Qty.1)
• 5010-405342-11 PLATE (Qty.1)
• 5003-300047-11 BRACKET(L) (Qty.1)
• 5010-405930-11 BRACKET (Qty.1)
• 5010-405344-11 COLLAR (Qty.1)
• 5010-306424-11 COVER (Qty.1)
• 5010-407435-11 SEAL (Qty.2)
• 5003-200013-11 DUCT(R) (Qty.1)
• 5003-200012-11 DUCT(L) (Qty.1)
• 5010-309775-11 PLATE (Qty.2)
• 5003-300040-11 PORT 2
• 5010-309520-11 SHUTTER(R) (Qty.1)
• 5010-309519-11 SHUTTER(L) (Qty.1)
• 5010-404625-11 PLATE (Qty.2)
• 5010-407356-11 BRACKET (Qty.2)
• 5010-404632-11 SUPPORT,PIN (Qty.1)
• 5010-405346-11 BRACKET (Qty.1)
• 5010-405347-11 SEAL (Qty.1)
• 5010-405348-11 SEAL (Qty.1)
• 5010-406157-11 PLATE (Qty.1)
• 5010-406155-11 PLATE (Qty.1)
• 5010-406158-11 PLATE (Qty.1)
• 5010-406156-11 PLATE (Qty.1)
• 5010-407046-11 PLATE (Qty.2)
• 5010-405582-11 PACKING (Qty.2)
• 5086-403977-11 SENSOR,CYLINDER ADH U/D #02 (Qty.1)
• 5086-400794-11 SENSOR,PROXIMITY ADH #01 (Qty.1)
• 5086-401786-11 SENSOR,PROXIMITY ADH #02 (Qty.1)
• 5086-400797-12 SENSOR,THERMOSTAT LHP #01 (Qty.1)
• 5041-000236-11 CABLE ASSY 1746253-3(THERMO EXT #03) (Qty.1)
• 5018-000014-11 LM GUIDE LS200118ALK1 (Qty.2)
• 020-006514-1 CAP SCREW CBSST6-12 (Qty.1)
• 5024-000080-11 AIR CYLINDER SSD-T1L2550-X09 (Qty.1)
• 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 (Qty.2)
• 028-003339-1 FITTING,TUBE M-5HL-6 (Qty.2)
• 026-007246-1 SPACER WSSS5-3-1 (Qty.8)
• 020-000005-1 CAP SCREW M3*6 SUS304 (Qty.20)
• 020-001091-1 CAP SCREW M4*16 SUS304 (Qty.8)
• 020-000518-1 CAP SCREW M3*4 SUS304 (Qty.11)
• 020-000012-1 CAP SCREW M3*12 SUS304 (Qty.2)
• 020-000057-1 CAP SCREW M5*12 SUS304 (Qty.8)
• 020-001167-1 CAP SCREW M5*10 SUS304 (Qty.8)
• 020-000090-1 CAP SCREW M6*20 SUS304 (Qty.4)
• 020-000030-1 CAP SCREW M4*8 SUS304 (Qty.4)
• 032-000024-1 FLAT WASHER M6 SUS304 POLISHED ROUND (Qty.1)
• 026-102041-1 SET PLATE TM-147-1-5563 WASHER (Qty.2)
• 020-000009-1 CAP SCREW M3*10 SUS304 (Qty.4)
• 020-000414-1 CAP SCREW M2*4 SUS304 (Qty.2)
• 020-001126-1 SET SCREW M4*5 SUS304 (Qty.2)
• 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND (Qty.9)

Assembly Part No: 5087-401608-12 PIN(ADH) ASSY

• 5010-305466-11 BASE,PIN (Qty.1)
• 5010-311607-11 BRACKET (Qty.1)
• 5010-404667-11 PLATE (Qty.1)
• 5010-400930-11 COLLAR (Qty.1)
• 5010-404577-11 ROD (Qty.1)
• 5010-401163-11 PLATE (Qty.1)
• 5010-307257-11 PLATE (Qty.1)
• 5010-306713-11 BLOCK (Qty.1)
• 5086-403976-11 SENSOR,CYLINDER ADH U/D #01 (Qty.1)
• 5003-400007-11 PIN(56) (Qty.3)
• 026-005603-1 SPACER WSSS10-4-1 (Qty.1)
• 5024-000079-11 AIR CYLINDER SSD-T1L1623-X06 (Qty.1)
• 5018-000011-11 LM GUIDE LS150080CLK1 (Qty.1)
• 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 (Qty.2)
• 020-000028-1 CAP SCREW M4*6 SUS304 (Qty.2)
• 020-000510-1 CAP SCREW M2.6*10 SUS304 (Qty.3)
• 020-000032-1 CAP SCREW M4*10 SUS304 (Qty.7)
• 020-000642-1 CAP SCREW M3*55 SUS304 (Qty.4)
• 020-002059-1 SET SCREW M3*5 SUS304 (Qty.2)
• 020-000519-1 CAP SCREW M3*16 SUS304 (Qty.2)
• 020-000005-1 CAP SCREW M3*6 SUS304 (Qty.2)
• 020-001093-1 CAP SCREW M4*14 SUS304 (Qty.2)
• 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE (Qty.4)

Assembly Part No: 5085-407303-12 SUPPORT(ADH) ASSY

• 5010-101307-11 RING(ADH),SUPPORT (Qty.1)
• 2910-437210-11 PACKING (Qty.1)
• 2910-420314-11 PACKING (Qty.1)
• 2910-303824-13 SEAL (Qty.1)
• 5010-203089-11 FLANGE (Qty.1)
• 5010-305464-11 PLATE (Qty.1)
• 5010-403103-11 PACKING (Qty.1)
• 5010-405457-11 PLATE (Qty.2)
• 028-002124-1 FITTING,TUBE F900-AT-6.35A (Qty.6)
• 028-002197-1 FITTING,TUBE F900-H-6.35A (Qty.1)
• 028-002257-1 FITTING,TUBE F900-L-6.35 (Qty.5)
• 028-002302-1 FITTING,TUBE F900-T-6.35 (Qty.5)
• 028-006637-1 FITTING,RESIN EUT1/4-C1 (Qty.1)
• 020-000057-1 CAP SCREW M5*12 SUS304 (Qty.12)
• 020-000020-1 CAP SCREW M3*20 SUS304 (Qty.6)
• 020-001089-1 CAP SCREW M3*14 SUS304 (Qty.6)
• 020-000028-1 CAP SCREW M4*6 SUS304 (Qty.12)
• 027-000431-1 O-RING BYTON AS568-251 BLACK (Qty.2)
• 020-000030-1 CAP SCREW M4*8 SUS304 (Qty.4)

Assembly Part No: 5087-401362-16 BASE(E-ADH) ASSY

• 5010-306409-11 COVER (Qty.1)
• 5010-308906-11 BRACKET (Qty.1)
• 5010-202625-11 COVER (Qty.1)
• 5010-404767-11 COVER (Qty.1)
• 5010-404768-11 COVER (Qty.1)
• 5010-405337-11 BRACKET (Qty.1)
• 5010-404318-11 BRACKET (Qty.1)
• 5010-306706-11 PAN,DRAIN (Qty.1)
• 5010-101124-11 COVER (Qty.1)
• 5010-308904-11 BLOCK (Qty.1)
• 5010-308910-11 BRACKET (Qty.1)
• 5010-101517-11 BASE (Qty.1)
• 5003-200010-11 PLATE,COOL (Qty.1)
• 5010-307207-11 PLATE (Qty.1)
• 5010-303511-11 PLATE (Qty.1)
• 5010-403503-11 PLATE (Qty.1)
• 5010-407044-11 BRACKET (Qty.1)
• 5010-202632-11 PIPE (Qty.1)
• 5010-308907-11 SEAT (Qty.1)
• 5010-405219-11 TUBE (Qty.1)
• 5041-000255-12 CABLE ASSY 1717319-7 (ADH EXT #01) (Qty.1)
• 5086-400795-11 CABLE,ADH SIG #01 (Qty.1)
• 5086-400798-11 SENSOR,PRESS ADH VAC #01 (Qty.1)
• 5086-401787-12 CABLE,ADH EXT #04 (Qty.1)
• 5086-402006-11 CABLE,GND ADH #02 (Qty.1)
• 5014-000001-11 ACOUSTIC UNIT REX-B875-CS1 (Qty.1)
• 5044-000003-11 PCB,I/F TMB2000(BOARD,IF TC CTRL #01) (Qty.1)
• 5044-000007-11 PCB,I/F TMB2101(BOARD,CONN HPB #01) (Qty.1)
• 5041-000228-11 CABLE ASSY 1717338-1 (DC ADH PWR #01) (Qty.1)
• 5041-000232-11 CABLE ASSY 1717320-1 (ADH EMO #01) (Qty.1)
• 5086-400802-11 CABLE,ADH EMO #02 (Qty.1)
• 5086-401627-11 CABLE,GND ADH #01 (Qty.1)
• 5010-407045-11 BRACKET (Qty.2)
• 5010-402221-11 HOLDER (Qty.1)
• 028-004347-1 FITTING,TUBE KJL06-01S (Qty.3)
• 028-004353-1 FITTING,TUBE KJU06-00 (Qty.1)
• 028-017536-1 FITTING,TUBE IN-233-1369 (Qty.1)
• 024-012193-1 SPEED CONTROLLER INA-14-176(199880070511 (Qty.6)
• 5012-000021-11 SOLENOID VALVE SS5Y3-03-X1236 (Qty.1)
• 5012-000069-11 AIR OPERATION VALVE AMG01-8BUR-X0421-T (Qty.1)
• 028-003337-1 FITTING,TUBE M-5H-4 (Qty.3)
• 028-003338-1 FITTING,TUBE M-5HL-4 (Qty.3)
• 020-001720-1 SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE (Qty.3)
• 044-000044-1 SUPPORT,PCB EM-3 (Qty.8)
• 026-006336-1 SPACER FWSSS-D5-V3-T1.3 (Qty.2)
• 020-001178-1 CAP SCREW M3*30 SUS304 (Qty.4)
• 020-000517-1 CAP SCREW M3*3 SUS304 (Qty.16)
• 020-001186-1 CAP SCREW M3*35 SUS304 (Qty.4)
• 020-000042-1 CAP SCREW M4*20 SUS304 (Qty.2)
• 020-000005-1 CAP SCREW M3*6 SUS304 (Qty.10)
• 020-000028-1 CAP SCREW M4*6 SUS304 (Qty.8)
• 020-000032-1 CAP SCREW M4*10 SUS304 (Qty.13)
• 020-002601-1 BAIND SCREW M3*4 SUS304 (Qty.4)
• 028-002157-1 FITTING,TUBE F900-F-9.52 (Qty.1)
• 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304
• 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER
• 028-006338-1 FITTING,TUBE EC4-M5A-TR (Qty.2)
• 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE (Qty.2)
• 017-002651-1 TUBE PFA-HG L 6.35*4.35-200*500 (Qty.2)
• 032-000016-1 WASHER,TOOTHED LOCK M4 SUS EXT (Qty.1)
• 020-000657-1 CAP SCREW M4*4 SUS304 (Qty.1)
• 028-002152-1 FITTING,TUBE F900-F-6.35 (Qty.2)
• 028-006361-1 FITTING,TUBE EUC6-TR (Qty.3)
• 028-005698-1 FITTING,TUBE BC6 (Qty.2)
• 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND (Qty.1)

Assembly Part No: 5085-402644-12 PLATE(ADH) ASSY

• 5010-402349-11 GUIDE 6
• 5043-000005-12 HOT PLATE NGT12-HP(ADH)-FCJ (Qty.1)
• 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304

Assembly Part No: 5085-407298-13 CHAMBER(ADH) ASSY

• 5010-101192-11 CHAMBER (Qty.1)
• 5010-202745-11 NOZZLE (Qty.1)
• 5010-404889-11 PLATE (Qty.1)
• 5010-202646-11 BRACKET (Qty.1)
• 5010-405338-11 SHAFT (Qty.4)
• 5010-405339-11 COLLAR (Qty.4)
• 5010-401175-11 PLATE (Qty.4)
• 5010-405602-11 SPACER (Qty.4)
• 5010-405340-11 BRACKET (Qty.1)
• 5010-202627-11 ARM(L) (Qty.1)
• 5010-203123-11 ARM(R) (Qty.1)
• 5010-309220-11 BRACKET(R) (Qty.1)
• 5010-309221-11 BRACKET(L) (Qty.1)
• 5010-407238-11 PLATE (Qty.2)
• 5010-405691-11 BRACKET (Qty.1)
• 5010-405729-11 BLOCK (Qty.1)
• 027-000088-1 O-RING BYTON AS568-023 BLACK (Qty.1)
• 5036-000001-11 #MAGNET TZ-0082 (Qty.1)
• 020-000020-1 CAP SCREW M3*20 SUS304 (Qty.6)
• 020-000417-1 CAP SCREW M2*10 SUS304 (Qty.2)
• 020-000028-1 CAP SCREW M4*6 SUS304 (Qty.6)
• 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER
• 020-001116-1 CAP SCREW M5*8 SUS304 (Qty.4)
• 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304

Assembly Part No: 5085-408278-14 COVER(ADH)ASSY,BACK

• 5010-307662-11 BASE,PANEL (Qty.1)
• 5010-306689-11 PANEL (Qty.1)
• 5010-306690-11 PLATE,NUT (Qty.1)
• 5010-306691-11 PLATE,NUT (Qty.1)
• 5010-307111-11 PACKING (Qty.1)
• 5010-405584-11 LEVER (Qty.2)
• 5010-406153-11 BASE,HOLDER (Qty.1)
• 5010-406150-11 HOLDER (Qty.1)
• 5010-406148-11 PACKING (Qty.1)
• 5010-406149-11 PACKING (Qty.1)
• 5010-308897-11 PANEL (Qty.1)
• 026-007272-1 SPACER FWSSS-D5-V3-T1.5 (Qty.5)
• 020-006233-1 FACE SCREW M3*8 ROUNDED KNOB BLACK THUMB SCREW (P0287
• 026-002709-1 HANDLE A-67 (Qty.1)
• 020-000005-1 CAP SCREW M3*6 SUS304 (Qty.2)
• 020-000518-1 CAP SCREW M3*4 SUS304 (Qty.4)
• 020-002603-1 BIND SCREW M3*10 SUS304 (Qty.13)
• 020-000414-1 CAP SCREW M2*4 SUS304 (Qty.2)
• 020-000034-1 CAP SCREW M4*12 SUS304 (Qty.2)
• Sold As-Is

This TEL Tokyo Electron 300mm Stainless ADH Adhesion Process Station is used working surplus. The unit does not include a viewport panel and there are minor changes to the upper piping lines (see photos). The physical condition is good, but there are signs of previous use and handling.