GASONICS 99-0339 Aura A2000LL Plasma Asher Stripper Novellus A95-205-01 Spare

• Part No: 99-0339
• Model No: A2000LL
• Diagram No: 99-2884
• AURA 2000-LL
• Non-Copper
• CE Marked
• Sold As-Is

Installed Components

• Load Lock Chamber Part No: A95-205-01, 56-7923
• Asyst Technologies Indexer Elevator Part No: 04630-003, GaSonics 94-1175
• Asyst Technologies Indexer Elevator Part No: 04630-004, GaSonics 94-1174
• Asyst Technologies Load Lock Elevator Part No: 04290-201, GaSonics 94-1118 (Qty. 2)
• GaSonics Loadlock Rear Panel Display Part No: Undetermined
• MKS Instruments Baratron Part No: 122A Series
• MKS Instruments Pressure Controller Part No: 152H-P0, Type 152
• MKS Instruments Valve Part No: 253B-11020
• HNL Asher Module Part No: Undetermined
• Varian Valve Part No: L6281-701
• Varian Valve Part No: L6281703
• Omron PLC Part No: C40H-060R-DE-V1, SYSMAC C40H

Installed PCB's

• GaSonics PCB Part No: 90-2658, CONTROLLER BOARD
• GaSonics PCB Part No: 90-2609, DISPLAY DECODER
• GaSonics PCB Part No: 90-2608, LOADLOCK INTERFACE BD
• Hine Design PCB Part No: 02423-001, 06764-001, ARM CONTROLLER BOARD
• Novellus Systems PCB Part No: 90-2735, INTERLOCK BD, A2000

This GaSonics 99-0339 Aura A2000LL Plasma Asher Stripper is used untested surplus and is being sold as-is. The system is missing the wafer handling robot/arm unit and other items. Some of the components have some minor surface corrosion, scuffs, dents, and bends to the outer panels (see photos). The physical condition is good, but there are signs of previous use and handling.