Novellus 99-0339 Aura A2000LL Plasma Asher Stripper GaSonics Non-Copper Surplus

• Part No: 99-0339
• Model No: A2000LL
• Diagram No: 99-2884
• AURA 2000-LL
• Non-Copper
• CE Marked

Installed Components

• Load Lock Chamber Part No: A01-218-01
• Asyst Technologies Indexer Elevator Part No: 04630-003, GaSonics 94-1175
• Asyst Technologies Indexer Elevator Part No: 04630-004, GaSonics 94-1174
• Asyst Technologies Load Lock Elevator Part No: 04290-201, GaSonics 94-1118
• Asyst Technologies Load Lock Elevator Part No: 04290-101, GaSonics 94-1119
• Dexon FFU Part No: MS43E-1040
• GaSonics Loadlock Rear Panel Display Part No: A95-107-01
• MKS Instruments Baratron Part No: 622A11TDE
• MKS Instruments Pressure Controller Part No: 152H-P0, Type 150
• MKS Instruments Valve Part No: 253B-11020
• Novellus Systems Waveguide Part No: 95-4477
• Varian Valve Part No: L6281703
• Omron PLC Part No: C40H-060R-DE-V1, SYSMAC C40H

Installed PCB's

• GaSonics PCB Part No: A90-031-03, PLASMA/LAMP FAILURE DETECTION
• GaSonics PCB Part No: 90-2658, CONTROLLER BOARD
• GaSonics PCB Part No: 90-2609, DISPLAY DECODER
• GaSonics PCB Part No: 90-2608, LOADLOCK INTERFACE BD
• Hine Design PCB Part No: 02423-001, 06764-001, ARM CONTROLLER BOARD
• Novellus Systems PCB Part No: 90-2735, INTERLOCK BD, A2000

This Novellus 99-0339 Aura A2000LL Plasma Asher Stripper is used working surplus. The unit is missing the wafer handling robot/arm unit, has scuffs and dents to the outer panels (see photos). The physical condition is good, but there are signs of previous use and handling.