TEL Alpha-8

As is condition

General Configuration:

Process Pyro Oxide

Wafer Size 200mm

Process Wafer Qty 126

Process Type Oxide

I/O Port / Smif I/O port

Load Lock NO

Carriet Slor 25 Slot

boat type Single

System Control:

System Controller TS4000Z

Operation Screen Touch Screen

Gas Flow Chart (front and rear) ◎ ◎

Temperature Controller M120

Vacuum Pressure Control N/A

Controller Transformer 1Φ 208V

Heater Transformer 3Φ 208V

Oxygen Analyzer N/A

HEC Pyro Ctl Yes

Process Gasses

Process Gas 1 PN2

Process Gas 2 O2

Process Gas 3 H2

Process Gas 4 HCl

Process Gas 5 ---

Process Gas 6 ---

Process Gas 7 ---

Gas Distrubution System

Basic Style Conventinal

Tubing Matrial SUS-316L

Tubing Finish VCR

Main Valve N/A

Air-Operated Valve Fujikin

MFC Aera

Exhaust Distribution System

Air-Operated Valve Type VCR Connect

Manual Valve Fujikin

Cold Trap ◎

Pump Line ◎

Wafer/Cassette Handling

Wafer Alignment ◎

Casstte Storage Qty 16

Casstte In/Out Port ◎

Casstte Handling Robot ◎

Wafer Transfer Type 1

Fork Matrial Ceramic

Fork Qty 5

Fork Variable Pitch ◎

Fork Wafer Presence Sensor ◎

Elevator Handling

Boat Elevator ◎

Auto Shutter◎

Boat Rotation ◎

Meachanical Parts ◎

Heating Chamber

Heater Type VMU-40-003SE

T/C Type 5

Spike T/C 5