ASML 1700

•        Software release - 5.0.0

•        Power - 400volts

•        Wafer Size - 200mm

•        Wafer Type - Notch

•        Lase Model - Cymer XL-360 (60w)

•        Laser type - Cymer laser

•        OIU/Reticle - RightConfiguration

•        Chemical sampling port

•        WaterCooling for El. Cabinet

•        Universal Prealignement

•        Wafer Track Interface - DNS RF3/200

•        WH carrier interface - 25 wafer open cassette kit

•        Mark sensor (WH opt.prealigner)

•        Integrated Reticle Library

•        IRIS 6-inches reticle

•        Recipe Creator

•        EFESE

•        Dose Mapper standard

•        Polarization metrology module

•        Image tuner

•        Grid Mapper

•        AGILE

•        LithoCruiser