Plasma Etch BT-1 Plasma Cleaning Plasma Etching RIE Processing System

This Plasma Etch BT-1 Plasma Processing System (208VAC, 3Ph, 60Hz, 30A) looks to be in good cosmetic condition, showing some signs of wear.

The power cord has five wires (three lines, one neutral, plus ground); we do not have any power outlets in our warehouse that have five wires, so we are unable to power up this system, or any of it components.

Among other things, this system features an RFPP RF5S Plasma Power Supply, with I2250001 Controller, and SPR-845 RF Match, a Mitsubishi Melsec FX-48MR/FX-16EYS PLC, and a pair of Unit UFC-8100 Mass Flow Controllers.

Sold as-is.

Approximate overall unpacked dimensions: 40"L x 26"W x 72"H.