OAI Optical Associates 804MBA Front + Backside Mask Aligner (500W DUV)

This OAI Optical Associates 804MBA-086265 Front and Backside Mask Aligner looks to be in good cosmetic condition, showing some signs of wear.

Among other things, it features a 0130-043-16 Lamp Housing (Mirror: 260 NM, Sensor: 260/365 NM, Lamp: 500W DUV, Requires .20"H2O Exhaust), a Nanolithosolutions Vacuum Chuck and Controller, a couple computer monitors, a Manual, and many accessories, as shown.

It did not have a power supply with it when we got it, but we had an HTG supply in our warehouse, which seems to have the right connectors on the back, so we will included it.

The power supply powers up, and the power light and and fan come on, but I could not get it to do much. I turned all of the dials, and flipped all of the switches, but the meter needles were unresponsive, and it did not seem to power up the lamp when I pressed the "Start" switch.

The system powers up, and power lights illuminate on the various modules, and the touch screen is responsive, and some cross-hairs come on the monitors.

However, this is the extent of my testing of this system; I lack the knowledge and equipment to formally test it, and it is being sold as-is.

Approximate overall unpacked dimensions: 63"L x 48"W x 40"H.