PLASMA-THERM 790 6" RIE Reactive Ion Etch Plasma Sys, TPH240 Turbo Pump

This Plasma-Therm 790 6" RIE Reactive Ion Etch Main Frame Plasma System looks to be in good cosmetic condition, showing some signs of wear.

Among other things, this system includes an Plasma-Therm Industrial Products AM-5 Auto Matching Network (500W, 13.56MHz) with AMN-PS2A RF Controller, an RFPP RF-5S RF Power Supply (500W @ 13.56MHz), a Pfeiffer Balzers TPH 240 Turbo Vacuum Pump with TCP 380 Power Supply, an MKS 153 Control Valve, and four Mass Flow Controllers, as shown.

This system requires 208VAC, 60Hz, but it appears to have five input wires (three black line wires, and green ground wire, and an white neutral wire); we do not have any power outlets that accommodate five wires, so we have no way of powering up or testing this system, or any of its components, and it is being sold as-is.

Approximate overall unpacked dimensions: 53"L x 38"W x 68"H.