1997 DNS SKW200 3C/3D

As-is condition

This tool is missing some parts including the main controller which means this is a parts tool

Wafer Flow : Left to Right

TOOL SPECIFIC INFORMATION

1. OEM: DNS

2. MODEL: SK-200W-BVPE

3. PROCESS: In Line Coat & Dev

4. WAFER SIZE: 200mm

5. SYSTEM POWER RATING: 208 AC 3-PHASE

6. LOADING : Open cassette 4 stage

SYSTEM CONFIGURATION

1. MAIN BODY X 2

2. CASSETTE INDEX STATION 1 X 4 SIDE LOADING x1

3. WAFER TRANSFER ROBOT X 4

4. Canon Type I/F-B

5. Power box(USA Type) : Current control system

6. Local Chemical Box

7. Temp & Humidity control unit x 3set

8. Exh Fan control unit

PR RESIST COATER UNIT x3

1. 4 NOZZLES PER CUP WITH IDI300 PUMP SYSTEM

: Total 4 PR pump setting on the Tool

2. SOLVENT RINSE (EBR, BACK, CUP) SYSTEM

4. CHEMICAL SUPPLY SYSTEM FOR COT UNIT (PR, SOLVENT,HMDS)

3. COATER CUP TEMPERATURE SYNCHRONIZED CONTROL SYSTEM(THC)

5. Circulator system(PR, Dev nozzle)

DEVELOPER UNIT x 4

1. 2DEVELOPER NOZZLE, 4 BACK SIDE Rinse nozzle, 2 DI RINSE NOZZLES

* Missing Parts

: Host controller

: IDI Pump controller 2set

: Spin Servo Amp 2set

: EEW Lamp House 2set