LAM Research 490 AutoEtch Plama Etch 150mm Configuration

LAM 490 AutoEtcher

•Polysilicon: 490

•Wafer size: 6 inch

•Upgraded TFT monitors

•Wafer detection

•Incl maintenance console

•Conditon: AS IS (No Chiller, No pump but with ENI RF Generator)

Features:

•Single-wafer processing

•Fully automated microprocessor control

•Cassette-to-cassette wafer processing

•Vacuum load locked

•Programmable, variable electrode spacing

•Endpoint detection

•Configurable for 3-inch to 6-inch wafers

•Stand-alone or bulk-head mount configuration