2006 AMAT Oasis clean
2006 AMAT Oasis clean
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Description
Vintage 2006
300mm
As is
Date of manufacture: 2006
Software revision: OA_B3.0_38
Configuration:
ChA Axiom (Dry strip)
ChB Tempest (Wet etch, NH4OH, H2O2, HF)
ChD Tempest (Wet etch, NH4OH, H2O2, HF)
Modules:
Mainframe
FI (Yaskawa robot)
Bulkfill Chemical cabinet
Rotary vacuum pump (for ChA)
Main AC box
Generator rack
Connection details: 208V 3fase 50/60Hz 240A
Specifications
Manufacturer | AMAT |
Model | Oasis clean |
Year | 2006 |
Condition | Used |
Stock Number | BM2237 |