2010 TEL Trias K CVD sytem
2010 TEL Trias K CVD sytem
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Description
CVD System, 12” <45nm process
Vintage 2010 2 Chambers: CVD & ALD
Process: NiOx, HfOx
Trias cluster: 2 Loadports LM: Front end
Main power distribution (MPD)
Transfer module, TM
EX reactor, PM2:
Plasma capability: No
Includes:
Ozonizer & H20 Box
2 Touch screens ozonizer
High-k CVD reactor PM4:
Thermal based deposition
Transformer box (Hi-K) option elec box:
Manuals & Spareparts included
The machine is in absolute as good as new condition ex R&D facility
PM2: Hafnium Nickel Titaan Vanadium
PM4: Hafnium Nickel Titaan Ruthenium Strontium
Specifications
Manufacturer | TEL |
Model | Trias K CVD sytem |
Year | 2010 |
Condition | Used |
Stock Number | BM2233 |