Axcelis Optima HD High Current Implanter Parts system
Axcelis Optima HD High Current Implanter Parts system
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Description
Included are:
The Magnet
LoadPoart
Chamber
Gas Box
See pictures
Specifications
| Manufacturer | Axcelis |
| Model | Optima HD |
| Condition | Used |
| Stock Number | GOD06052022 |
| WAFER SIZE | 200mm |