2000 Novellus Sabre XT Electrofill System

Tool is complete , buy buyer needs to judge by the photo's , sold as is only

The configuration as below buy buyer needs to confirm by photo's

ECD plater, 8"

Copper electroplating system

(3) Electrofill SRD modules

(3) Post-electrofill SRD modules

(4) Port load

CE Marked

CoNAN, no SAC

Has continuity verification option

Plating cell configuration:

Item Cell 1 / Cell 2 / Cell 3

Anode Type Grooved P/N: 15-139710-00

Membrane Type Diffuser & Standard P/N: 15-139964-00 (membrane) & 16-139965-00 (diffuser)

Nozzle Type Modified Mushroom 0.75"

Filter Type / Size Millipore Guardian HPX 10" - 0.05 micron

Pump Idle Rate (LPM) 6

Pump Plate Rate (LPM) 6

Main Bath & Filter Debubbling YES

Cell Isolation Valves YES

Anode Chamber Angle 3 deg.

Anode Chamber Spacer Size 3/8"

DIW Nozzle Part Number 632-364

SRD Btm Rinse Nozzle 632-485

Clamshell configuration:

Description Cell 1 / Cell 2 / Cell 3

Clamshell Entry Model Light Active Angle Entry

Clamshell Entry Rate 12 mm/sec

Clamshell Cup / Cone Model Phase 1

Contact Type Paliney 7 P/N: 17-127109-00

Cup Size 196 mm

Cup Insert Size 7.45" / 7.42" / 7.45"

Cup Insert Spacer NA Applies to phase 1a only

Power supply/Robot/Computer configuration:

Description Value

Robot Model Brook Model 002-7090-02 / Serial # 0003-10824

Robot Firmware Version 1.2C

Power Supply Model Advanced Energy Ewave

Power Supply Firmware Version 11

QNX Software version 4.395 build 38

Proteus Software Version 1.1.188 build 30

Neslab HX-75 C4 High Temperature Recirculating Chiller P/N: 27-125374

CMS Internal Hardware Kit

Light Tower Option Red / Yellow / Green

Active Angle Entry (phase 3 hardware)

Post Filter Sample Port

Lower Facility Panel w/CDA line for Chemicals

2000 vintage.