1997 Nikon NSR-2205i12D

Photolithography Stepper (i-Line)

Vintage : 1997

Electric source: NEMABOX.i-Line

Chamber Type: ASAHIN2E-AShortBody(1800mm)

Reticle Size: 6 inch

Reticle Library: Nikon 10 Slot

Reticle microscope: Fixed

MAX Field Size: 22

PPD: Installed

Reticle Barcode Reader: Yes(on RETICLE

Reticle Case: 6 inch

Wafer Size: SEMI,8 inch, Flat Zone Type

Wafer Chuck: 8 inch

Pre Alignment2: 8 inch

Wafer Loader: Type2(A3)

Chip Leveling: Yes

In-Line: No

Wafer Carrier Table: Left/Right,in-Line(Right)

Alignment sensor: LSA/FIA

HP Laser: 5517C

LSALaser: 5mW

OF Detection: Nikon Standard

Rack Type: Standard(Right)

Body-OP Rack cable: 3m(Standard)

Lamp Power: 2kW

SHRINC: SHRINC3

VAX: 4000/96

Drive: DAT

Monitor: CRT