2009 Novellus Systems VECTOR Express - AHM
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Description
PECVD (Chemical Vapor Deposition)
Deposition Equipment
Currently Configured for: 300mm
Asset HDD not included
Software Version (include revision #)6.02B12
System Power Rating208 AC 3-Phase
Loading Configuration3 load port
Specifications
Manufacturer | Novellus Systems |
Model | VECTOR Express - AHM |
Year | 2009 |
Condition | Used |
Stock Number | BM2053 |