2011 TEL Tactras Vigus

OEM  TEL

Tool Model  Tactras-Vigus

Process  Oxide

Software Version (include revision #) Ver5.05-Rev502-STD-5.05a

System Power Rating  200 AC3-Phase for System

Loading Configuration  3 load port   

Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names) 

Chm/Unit Position  1  Loder Module-  

Chm/Unit Position  2  VTMN2  

Chm/Unit Position  3  Purge storage⁻  

Chm/Unit Position  4  Process Module 1 (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 

Chm/Unit Position  5  Process Module 2 (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 

Chm/Unit Position  6  Process Module 3 (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 

Chm/Unit Position  7  Process Module 4 (VIGUS-LK2)C4F8,C4F6,CH2F2,O2,CHF3,CF4,CO,N2,Ar,He,H2,CH3F,CO2※PM4 is Vigus-LK2 chamber 

Chm/Unit Position  8  Process Module 5 (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 

Chm/Unit Position  9  Process Module 6 (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 

Tool:    

Process Unit:  Model:Remark

Controller:  EC 

MFC/Pressure Unit:  FCS Device-net I/F

Type (Fujikin)

SEC-Z514MGXCS15-14W3

CM1：DNARETGAFKNV633 (MKS) PM1,2,3,5,6

CM2：DMA11TGAEKNN633 (MKS) PM4

Drive Mechanisms:  Yasukawa LM：z軸、R軸、H1軸、H2軸、θ：ACｻｰﾎﾞﾓｰﾀｰ

TM：y軸(ｽﾗｲﾀﾞ):ACｻｰﾎﾞﾓｰﾀｰ

r軸,θ軸:DDﾓｰﾀｰ 

FOUP Opener:  KWF-12C-T1(K-BL-601HAC1-SO-E)

Gas System:  1.125 inch 集積ﾀｲﾌﾟ(CKD)

13 + 3(Edge-Add-Gas) 

Exhuast System:  TMP（TMP-W3503LMC(T4)(VG250)(SHIMADZU)）

TM/LLM PUMP：MU100U-147 (KASHIYAMA)

Chamber type is as follows.

PM1: VIGUS1 HARC

PM2: VIGUS1 HARC

PM3: VIGUS1 HARC

PM4: VIGUS-LK2

PM5: VIGUS1 HARC

PM6: VIGUS1 HARC

No missing or damaged parts.