DEVICEENG WET Clean Strip Benches

Unit Price Unstated

Number of Units1

Manufacturer DEVICEENG

Model DE Korean Benches

Wafer Size Range   Minimum 200 mm  Maximum 200 mm  Set Size 200 mm

Number of Positions 12

Number of Robots 8

Position 1   Process Piranha  Tank Material Quartz

Position 2   Process Quick Dump Rinse  Other Features FMPVC

Position 3   Process Hydrofluoric Acid Etch  Tank Material PVDF

Position 4   Process Overflow Rinse  Other Features FMPVC

Position 5   Process SC-1  Tank Material Quartz

Position 6   Process Quick Dump Rinse  Other Features FMPVC

Position 7   Process SC-2  Tank Material Quartz

Position 8   Process Quick Dump Rinse  Other Features FMPVC

Position 9   Tank Material Stainless Steel  Other Features Low Pressure Dryer

Position 10   Tank Material Stainless Steel  Other Features Low Pressure Dryer 2

Position 11   Process Load  Other Features Stocker Robot

Position 12   Process Unload  Other Features Transfer Robot

Automatic Wafer Transfer YES

Automatic Wafer Transfer Type Stocker System

Controller Type PLC Controller Type

Year of Manufacture 2011

Condition Poor

Refurbished YES

Exterior Dimensions   Depth 1,023.622  in  (2,600.0 cm)

Weight 2,599  lb  (1,179 kg)