AMAT P5000
AMAT P5000
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Description
As is
200mm SILANE
Process Gases: SiH4, NH3, N2O, HE, CF4, AR, N2
Stand alone setup
Slit Valve Type: S Slit
Slit Valve Opening: Kalrez
Lamp module: Standard
Heater window: Quartz
Endpoint detector
Cluster throttle valve
VCR Manometer
RF Frequency: Single
Susceptor
Metal wafer lift
Downstream Plasma Apparatus
50Hz
Software version 4.26
(2) stand alone monitors
SMIF, 8 slot elevator
Specifications
Manufacturer | AMAT |
Model | P5000 |
Condition | Used |
Stock Number | BM1874 |