2009 AMAT Enabler
2009 AMAT Enabler
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Description
3x Enabler chambers, RF Rack, AC rack.
Sold: EFEM, Buffer chamber, RF Generators.
Category: Etch
Maker: AMAT
Model: Enabler
Wafer Size: 300
Process: Oxide
Specifications
| Manufacturer | AMAT |
| Model | Enabler |
| Year | 2009 |
| Condition | Used |
| Stock Number | BM1630 |