2013 AMAT Producer SE SACVD

Currently configured for: 300mm

Asset HDD not included

Currently deinstalled and in storage

Software Version (include revision #) B5.3_100  

System Power Rating 208 AC 3-Phase  

Loading Configuration 2 ENHANCED 25

WAFER FOUP V2 (LOADPORT)

Vendor Chm Model

Chm/Unit Position  1 SACVD SE TWIN A TEOS,TEB,TEOP,O3,NF3  

Chm/Unit Position  2 SACVD SE TWIN B TEOS,TEB,TEOP,O3,NF3  

Description

Tool:  

Process Unit: SACVD SE Twin Pallet Model: (02) OXIDE BPSG Remark x 1

Controller: N/A x 1

MFC/Pressure Unit: N/A x 2

Drive Mechanisms: N/A x 2

FOUP Opener: TDK TAS300 series (include E99 Tag Reader) x 2

Gas System:N/A x 2

Exhuast System: Scrubber　Zenith / Process pump iHs1000 x 1/2