Karl Suss PA200 semiautomatic prober with temperature controlled 200mm chuck and dark chamber

Karl Suss PA200 semiautomatic prober with temperature controlled 200mm chuck and dark chamber

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Description

Suss Microtech PA200 semiautomatic prober


Dark chamber

Motorized microscope mount with 50mm (2") XY travel and pneumatic lift

Mitutoyo FS-60 microscope with Plan APO 2/10/20/50x objectives

DC servo driven wafer stage with linear encoders

Rigid platten with vacuum manifold

Temperature controlled 200mm vacuum wafer chuck 


Temptronic controller and TPO-3000A cooling unit

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Specifications

ManufacturerKarl Suss
ModelPA200 semiautomatic prober with temperature controlled 200mm chuck and dark chamber
ConditionUsed
Stock NumberBM1187