1996 Semitool 1-Chamber Spray Acid Tool (SAT)
1996 Semitool 1-Chamber Spray Acid Tool (SAT)
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Description
Manufacturer:Semitool
Model:Spray Acid Tool (1-chamber, 300mm)
Vintage:N/A
Max Wafer:300mm
System Dimensions:59 x 40 x 74 inches
Configuration:
1-Chamber SAT, 300mm capable, 1 heated tank, 1 fill vessel
MODEL: SAT1100S1PSHU
DETAILS:
SEMITOOL 1-CHAMBER 300MM SPRAY ACID TOOL (SAT) consisting of:
- Model: SAT-1100S1PSHU
- Spray Acid Tool (SAT)
- Single Chamber
- Up to 12"/300mm Capable
- Capacity: Single 25-Wafer Cassette, 300mm wafers
- 1 Pneumatic Trebor 610 Pump for chemical delivery
- 1 Hot DI Water Loop
- Capable of bulk fill hook-up (external)
- Front and rear Touch Screen Interface
- Emergency Off (EMO
- System Power: 208V, 3PH, 40Amp, 50/60Hz
CONDITION:
As-Is / Where-Is Condition.
Specifications
Manufacturer | Semitool |
Model | 1-Chamber Spray Acid Tool (SAT) |
Year | 1996 |
Condition | Used |
Stock Number | GOD030620212 |
WAFER SIZE | 300mm |