AMAT Electrostatic chucks PN 0010-16858
AMAT Electrostatic chucks PN 0010-16858
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Available quantity:5
Description
Refurbished condition
5 AMAT Electrostatic chucks PN 001-16858. All have received the below refurb from Invax technologies in California.
Refurbish Option 3 - Replace Dielectric & MCA Pads Option 3 refurbish is typically required when ESC has dielectric breakdown. Item Description Unit Price 3. Option 3 - Refurbish process includes: $ 22,550 o De-contaminate part o Clean to ‘as new’ condition o Remove failed dielectric o Remove failed HV/RF electrodes, as necessary o Machine ceramic to remove/minimize chips and restore critical dimensions. o Deposit new HV/RF electrodes o Apply new dielectric o Apply new MCA pads o Helium leak check assembly o Perform full functional tests under simulated process conditions.
Test Results
Wafer size: 12" standard
Type: bipolar
Helium leak rate at operating voltage: 500Vdc
Backside Pressure: Helium Leak Rate:
4 torr 0.3sccm
6 torr 0.4sccm
8 torr 0.5sccm
Maximum pressure: >12 torr
Residual pressure: <5 torr
Leakage current at 800 Vdc: <1mA
Specifications
Manufacturer | AMAT |
Model | Electrostatic chucks PN 0010-16858 |
Condition | Refurbished |
Stock Number | BM516 |