1996 Suss Microtec Falcon Polyimid Developer
1996 Suss Microtec Falcon Polyimid Developer
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Description
Vintage 1996
Condition: very good
Developer with 2 chambers for spray developing.
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Photoresist Type Negative
Number of Cassette Elevators 2
Number of Developer Dispensers 2
Wafer Backside Rinse YES
Number of Hot Plates 0
Number of Chill Plates 0
Controller Type Microprocessor Controller Type
Power Requirements 380 V 50/60 Hz 3 Phase
Specifications
Manufacturer | Suss Microtec |
Model | Falcon Polyimid Developer |
Year | 1996 |
Condition | Used |
Serial Number | 11556 |
Stock Number | Tara-127 |
Wafer Size | 150-200mm |