1995 DNS Dainippon Screen SK-W80B-AVPE 2C2D Coater Developer
1995 DNS Dainippon Screen SK-W80B-AVPE 2C2D Coater Developer
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Description
In line
Left to right
2 coater 2 developer
System Details
a. Computer: S/N: FC9801B, Included HDD, Included Backup Disc
b. Coater Unit: 3 and 4, 4-Nozzle with Iwaki Pump
c. Developer Unit: 5 and 6, 2-Nozzle
d. Bake Unit: Cool Plate - 3ea. (Unit 8/11/14)
Hot Plate - 8ea. (Unit 9/10/12/13/15/16/17/18)
e. EEW Unit: 1ea. with Hamamatsu Light Source
f. Chemical Box/Pump: 5ea. – Model: INR-244-404
Specifications
Manufacturer | DNS Dainippon Screen |
Model | SK-W80B-AVPE |
Year | 1995 |
Condition | Used |
Stock Number | GOD10022021 |
WAFER SIZE | 200mm |