1995 DNS Dainippon Screen SK-W80B-AVPE 2C2D Coater Developer

1995 DNS Dainippon Screen SK-W80B-AVPE 2C2D Coater Developer

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Description

In line

Left to right

2 coater 2 developer


System Details

a. Computer: S/N: FC9801B, Included HDD, Included Backup Disc

b. Coater Unit: 3 and 4, 4-Nozzle with Iwaki Pump

c. Developer Unit: 5 and 6, 2-Nozzle

d. Bake Unit: Cool Plate - 3ea. (Unit 8/11/14)

Hot Plate - 8ea. (Unit 9/10/12/13/15/16/17/18)

e. EEW Unit: 1ea. with Hamamatsu Light Source

f. Chemical Box/Pump: 5ea. – Model: INR-244-404

Specifications

ManufacturerDNS Dainippon Screen
ModelSK-W80B-AVPE
Year1995
ConditionUsed
Stock NumberGOD10022021
WAFER SIZE200mm