AMAT Centura5200 WxZ 3 Chamber as is tool
AMAT Centura5200 WxZ 3 Chamber as is tool
Contact us for price
orCall +353 (0) 87 192 1110
Description
6inch Centura5200 Phase II WxZ 3 Chamber As-is Tool
Narrowbody Loadlock A,B
Ch#E Multi Cool Down
Ch#A,B,D WxZ Chamber (Heater Type , RF Match)
Seriplex Type Gas Panel (Top feed)
Buffer HP Robot
Cable Length 25ft
System Controller is Power On Condition.
Specifications
Manufacturer | AMAT |
Model | Centura5200 WxZ |
Condition | Used |
Stock Number | GOD04022021 |
WAFER SIZE | 150mm |