2007 Ulvac Entron W300 PVD

2007 Ulvac Entron W300 PVD

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Description

EFEM/2VTM Core

1x NOR-Co ch.

1x SIS-TTN ch.

1x ALN-Degas

1x NOR-WSi ch.

1x NOR-WWN ch.

2x Chiller


CHAMBER



Specifications

ManufacturerUlvac
ModelEntron W300 PVD
Year2007
ConditionUsed
Stock NumberOD260121