2007 Nikon NSR-TFHi14DL Stepper

WAFER SIZE 200mm

VINTAGE 2007

MCSV BASIC3.46D

OCS OPTION GOCS 3.45Q

MAIN SYSTEM Windows 7 Professional

PC TYPE Nest-α

DISK DRIVE 2x Intel SSDSC2BA200G3 drives configured as Raid I SCSI array

Illumination SHRINC 4

WAFER STAGE TYPE TFH 8 inch/ 200mm notch

FIELD SIZE 22.0mm

WAFER ALIGNMENT LSA, LIA, FIA

AUTO FOCUS AF system present

WAFER LOADER WL Type 3 8 inch/ 200mm notch

CONTROL RACK POSITION To left of main body

RETICLE LOADER 6" reticle Barcode reader

PPD Not present

BARCODE READER Present

CHAMBER TEMP 19.0°C

CHAMBER TYPE Sendai S25

LENS DATA AVAILABLE 0.30 NA to 0.45 low NA lens, variable

STATUS Idle, facilitized