TEL FORMULA ALD HIGH-K 3 Sets for sale
TEL FORMULA ALD HIGH-K 3 Sets for sale
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Description
Tube Material: Quartz
Boat Material: Quartz
Production wafeRs: 50
Pressure control: APC Valve
Process Gas: TEMAZ(F.S:1.0sccm),ZAC(F.S:1.0sccm),TMA(F.S:300sccm),O3(F.S:20slm,300g/m3),N2,OCTANE
Vaporizer Maker:STEC(TMA,ZAC,TEMAZ)
Vaporizer TYPE:LSC-F530(TMA),TL-2011(ZAC,TEMAZ)
MFC Maker: STEC
MFC Model: Z500series
Process Temp: 200-300deg
HD included
Specifications
Manufacturer | TEL |
Model | FORMULA ALD HIGH-K |
Year | 2015 |
Condition | Used |
Stock Number | GOD11082020 |
WAFER SIZE | 300mm |
VINTAGES | 2005, 2015, 2015 |