2001 AMAT Semvision CX

Bid sale. Bid Due by the 27th of January 2025

Model: SEM Vision cX

Vintage: 2001

OEM: AMAT

S/N: W829

Accessory: 1 Baking Box, 1 User Manual

Condition at Time of Shutdown:

• Operated until 2012. Planned shutdown due to reduced usage.
• No critical defects were reported.

Missing Items:

1. UPS (⑤): Battery removed; set to bypass mode.
2. Water Leakage/Fire Alarm Panel (⑥): Battery removed; set to bypass mode.

Issues:

• Ion Pump Controller Display Malfunction:
• → The unit functions normally, but the display panel is defective, making it impossible to monitor vacuum levels.
• ※ Dry pump is not included as part of the assets.

Device Specifications

Resolution: 4nm @ 1kV

Acceleration Voltage: 0.5kV to 15kV

Probe Current: 30, 100 pA

Magnification: ×200 to ×20,000

Tilt Angle: 15°, 30°, 45°

Rotation Angle: 0°, 45°, 90°, 180°

Wafer Size: 200 mm

Voltage (Main Unit): 3-phase 208 VAC

Voltage (EDX Rack): Single-phase 110 VAC

Name | Installation Location

1. Main Unit: TM 2nd Floor, Clean Room (CR)
2. EDX Analyzer: TM 2nd Floor, Clean Room (CR)
3. EDX Compressor: TM 2nd Floor, Return Area
4. Transformer: TM 1st Floor, Utility (UT)
5. UPS: TM 1st Floor, Utility (UT)
6. Alarm Panel: TM 1st Floor, Utility (UT)
7. Distribution Board: TM 1st Floor, Utility (UT)

※ Dry pump is not included.